Electromechanical modeling and simulation of mems-based piezoelectric vibration energy harvesting device using PZT-5h material

In this study, we describe the operation of piezoelectric energy converters and electromechanical modeling of piezoelectric energy harvesting (PEH) devices based on microelectromechanical systems (MEMS) for low-power sensors. Consideration is given to a piezoelectric energy harvester based on standard MEMS. The parameters are determined and optimized using a simple MEMS cantilever model.